The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2013
Filed:
Oct. 19, 2009
Hiroshi Fujisawa, Nara, JP;
Hiroshi Fujisawa, Nara, JP;
Creative Technology Corporation, Tokyo, JP;
Abstract
Provided are a method and an apparatus capable of determining which attracting electrode in an electrostatic chuck of bipolar type has a capacitance abnormality occurring in its vicinity. In this inspection method, a positive auxiliary electrode () and a negative auxiliary electrode () are provided in a dielectric body () of an electrostatic chuck (), and are connected to a ground potential portion. Then, transient currents (Ito I) flowing through the attracting electrodes (and) and the auxiliary electrodes (and) are measured when direct current voltages (+V and −V) are applied or cease to be applied from a chuck power supply () to the electrostatic chuck () under a state in which an object () to be attracted is not mounted, and a transient current (I) (=I−Ior I−I) is calculated. The obtained transient currents are compared to respective predetermined reference values, to thereby determine a capacitance abnormality in the electrostatic chuck ().
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile