The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2013
Filed:
Oct. 06, 2011
Christian Witt, Woodbridge, CT (US);
Christian Witt, Woodbridge, CT (US);
GLOBALFOUNDRIES, Inc., Grand Cayman, KY;
Abstract
An integrated circuit device having doped conductive contacts, and methods for its fabrication, are provided. One such method involves depositing a dielectric layer on the surface of a silicon semiconductor substrate, and photolithographically patterning a plurality of contact trenches on the dielectric layer. A tantalum barrier is deposited in the trenches, followed by a copper seed layer. The trenches are then plated with copper, including an overburden. A layer of doping material is deposited atop the overburden, and diffused into the copper by a heat treatment process. The overburden is then removed through chemical mechanical planarization, resulting in usable conductive interconnects in the trenches.