The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 12, 2013

Filed:

Jul. 08, 2009
Applicants:

Terence Quintin Collier, Rowlett, TX (US);

Charles A. Lhota, San Antonio, TX (US);

David Barry Rennie, Bethlehem, PA (US);

Rajkumar Ramamurthi, Cave Creek, AZ (US);

Madhukar Bhaskara Rao, Fogelsville, PA (US);

Dnyanesh Chandrakant Tamboli, Breinigsville, PA (US);

Inventors:

Terence Quintin Collier, Rowlett, TX (US);

Charles A. Lhota, San Antonio, TX (US);

David Barry Rennie, Bethlehem, PA (US);

Rajkumar Ramamurthi, Cave Creek, AZ (US);

Madhukar Bhaskara Rao, Fogelsville, PA (US);

Dnyanesh Chandrakant Tamboli, Breinigsville, PA (US);

Assignee:

Air Products and Chemicals, Inc., Allentown, PA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/44 (2006.01); C03C 15/00 (2006.01); C03C 25/68 (2006.01); C09K 13/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

Adherence of contaminant residues or particles is suppressed, corrosion of exposed surfaces is substantially reduced or eliminated during the process of dicing a wafer by sawing. A fluoride-free aqueous composition comprising a dicarboxylic acid and/or salt thereof; a hydroxycarboxylic acid and/or salt thereof or amine group containing acid, a surfactant and deionized water is employed.


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