The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2013
Filed:
Jun. 17, 2010
Cliff LA Croix, Livermore, CA (US);
Armen Avoyan, Glendale, CA (US);
Duane Outka, Fremont, CA (US);
Catherine Zhou, Fremont, CA (US);
Hong Shih, Walnut, CA (US);
Cliff La Croix, Livermore, CA (US);
Armen Avoyan, Glendale, CA (US);
Duane Outka, Fremont, CA (US);
Catherine Zhou, Fremont, CA (US);
Hong Shih, Walnut, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
In accordance with one embodiment of the present disclosure, an electrode carrier assembly is provided including an electrode carrying annulus and a plurality of electrode mounting members. The electrode carrying annulus includes an electrode containment sidewall that forms an inner or outer radius of the electrode carrying annulus. The electrode carrying annulus further includes a plurality of radial sidewall projections that project radially away from the electrode containment sidewall. The radial sidewall projections each include an upward-facing tapered spacer including an upward-facing micro-mesa. The electrode mounting members each include a downward-facing tapered spacer including a downward-facing micro-mesa. The electrode mounting members are rotatably engaged with the electrode carrying annulus, and are configured to rotate between a free position and a bracketed position.