The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2013
Filed:
Jun. 06, 2011
Ming Jiang, San Jose, CA (US);
Ronghui Zhou, Fremont, CA (US);
Guanghong Luo, Fremont, CA (US);
Masahiro Osugi, Fremont, CA (US);
Danning Yang, Fremont, CA (US);
Ming Jiang, San Jose, CA (US);
Ronghui Zhou, Fremont, CA (US);
Guanghong Luo, Fremont, CA (US);
Masahiro Osugi, Fremont, CA (US);
Danning Yang, Fremont, CA (US);
Western Digital (Fremont), LLC, Fremont, CA (US);
Abstract
A process for fabricating a magnetic recording transducer for use in a data storage system comprises providing a substrate, an underlayer and a first nonmagnetic intermediate layer deposited to a first thickness on and in contact with the underlayer, performing a first scanning polishing on a first section of the first intermediate layer to planarize the first section of the first intermediate layer to a second thickness, providing a main pole in the planarized first section of the first intermediate layer, providing a first pattern of photoresist on and in contact with the first section of the first intermediate layer, the pattern comprising an aperture to define a side shield trench, performing a wet etch to remove at least a portion of the first intermediate layer thereby exposing at least one of the plurality of main pole sides, and depositing side shield material in the side shield trench.