The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2013
Filed:
Dec. 17, 2010
Wen-yuh Jywe, Huwei Chen, TW;
Jing-chung Shen, Huwei Chen, TW;
Chin-tien Yang, Huwei Chen, TW;
Chien-hung Liu, Huwei Chen, TW;
Jau-jiu Ju, Huwei Chen, TW;
Chia-hung Wu, Huwei Chen, TW;
Chun-chieh Huang, Huwei Chen, TW;
Lili Duan, Huwei Chen, TW;
Yuan-chin Lee, Huwei Chen, TW;
Wen-Yuh Jywe, Huwei Chen, TW;
Jing-Chung Shen, Huwei Chen, TW;
Chin-Tien Yang, Huwei Chen, TW;
Chien-Hung Liu, Huwei Chen, TW;
Jau-Jiu Ju, Huwei Chen, TW;
Chia-Hung Wu, Huwei Chen, TW;
Chun-Chieh Huang, Huwei Chen, TW;
Lili Duan, Huwei Chen, TW;
Yuan-Chin Lee, Huwei Chen, TW;
National Formosa University, Huwei Chen, Yunlin Hsien, TW;
Abstract
A manufacturing-process equipment has a platform assembly, a measurement feedback assembly and a laser-working assembly. The platform assembly has a base and a hybrid-moving platform. The base has a mounting frame. The hybrid-moving platform is mounted on the base and has a long-stroke moving stage and a piezo-driven micro-stage. The long-stroke moving stage has a benchmark set and a driving device. The piezo-driven micro-stage is connected to the long-stroke moving stage and has a working platform. The measurement feedback assembly is securely mounted on the platform assembly and has a laser interferometer, a reflecting device and a signal-receiving device. The laser-working assembly is mounted on the platform assembly, is electrically connected to the measurement feedback assembly and has a laser direct-writing head, a controlling interface device and a positioning interface device.