The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 05, 2013

Filed:

Mar. 22, 2011
Applicants:

Thomas F. Kelly, Madison, WI (US);

Daniel R. Lenz, Stoughton, WI (US);

Scott A. Wiener, Mount Horeb, WI (US);

Inventors:

Thomas F. Kelly, Madison, WI (US);

Daniel R. Lenz, Stoughton, WI (US);

Scott A. Wiener, Mount Horeb, WI (US);

Assignee:

Cameca Instruments, Inc., Madison, WI (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 49/40 (2006.01);
U.S. Cl.
CPC ...
Abstract

An atom probe includes a detector which registers the time of flight of ions evaporated from a specimen, as well as the positions on the detector at which the ions impact and the kinetic energies of the ions. The detected position allows the original locations of the ions on the specimen to be mapped, and the times of flight and kinetic energies can be spectrally analyzed (e.g., binned into sets of like values) to determine the elemental identities of the ions. The use of kinetic energy data as well as time of flight data can allow more accurate identification of composition than where time of flight data are used alone, as in traditional atom probes.


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