The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2013
Filed:
Nov. 28, 2011
Gregory S. Chrisman, Essex Junction, VT (US);
Edward C. Cooney, Iii, Jericho, VT (US);
Jeffrey P. Gambino, Westford, VT (US);
Zhong-xiang He, Essex Junction, VT (US);
Thomas L. Mcdevitt, Underhill, VT (US);
Eva A. Shah, Essex Junction, VT (US);
Gregory S. Chrisman, Essex Junction, VT (US);
Edward C. Cooney, III, Jericho, VT (US);
Jeffrey P. Gambino, Westford, VT (US);
Zhong-Xiang He, Essex Junction, VT (US);
Thomas L. McDevitt, Underhill, VT (US);
Eva A. Shah, Essex Junction, VT (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A structure and method for fabricating the structure that provides a metal wire having a first height at an upper surface. An insulating material surrounding said metal wire is etched to a second height below said first height of said upper surface. The metal wire from said upper surface, after etching said insulating material, is planarized to remove sufficient material from a lateral edge portion of said metal wire such that a height of said lateral edge portion is equivalent to said second height of said insulating material surrounding said metal wire.