The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2013
Filed:
Oct. 28, 2010
Applicants:
Yuichiro Sasaki, Nara, JP;
Masafumi Kubota, Osaka, JP;
Shigenori Hayashi, Nara, JP;
Inventors:
Assignee:
Panasonic Corporation, Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
After a fin-semiconductor region () is formed on a substrate (), impurity-containing gas and oxygen-containing gas are used to perform plasma doping on the fin-semiconductor region (). This forms impurity-doped region () in at least side portions of the fin-semiconductor region ().