The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2013
Filed:
Nov. 12, 2009
Applicants:
Sung Min Hong, Yongin-si, KR;
Kun Nyun Kim, Yongin-si, KR;
Young Chang JO, Suwon-si, KR;
Won Hyo Kim, Yongin-si, KR;
Inventors:
Sung Min Hong, Yongin-si, KR;
Kun Nyun Kim, Yongin-si, KR;
Young Chang Jo, Suwon-si, KR;
Won Hyo Kim, Yongin-si, KR;
Assignee:
Korea Electronics Technology Institute, Seongnam-si, Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 19/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A capacitive humidity sensor, and more particularly, to a capacitive humidity sensor and a manufacturing method thereof capable of increasing reliability of the sensor by forming a dehumidification layer of a polymer material having a large surface area between a lower electrode layer and an upper electrode layer while miniaturizing the humidity sensor by forming a sensor unit on an ROIC substrate.