The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2013
Filed:
Aug. 30, 2010
Mohammed F. Fayaz, Pleasantville, NY (US);
Julie L. Lee, Wappingers Falls, NY (US);
Leah M. Pastel, Essex, VT (US);
Maroun Kassab, Quebec, CA;
Mohammed F. Fayaz, Pleasantville, NY (US);
Julie L. Lee, Wappingers Falls, NY (US);
Leah M. Pastel, Essex, VT (US);
Maroun Kassab, Quebec, CA;
International Business Machines Corporation, Armonk, NY (US);
Abstract
Identifying systematic defects in wafer processing including performing defect inspection of a plurality of wafers, identifying defects in each of the plurality of wafers as not being associated with a trivial and/or known root cause, determining a physical location on each wafer where each of the defects occurs and correlating the physical locations where each of the defects occurs with cell instances defined for those physical locations.