The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2013
Filed:
Aug. 23, 2010
Willem F. A. Besling, Eindhoven, NL;
Aarnoud L. Roest, Geldrop, NL;
Klaus Reimann, Eindhoven, NL;
Linda Van Leuken-peters, Maarheeze, NL;
Willem F. A. Besling, Eindhoven, NL;
Aarnoud L. Roest, Geldrop, NL;
Klaus Reimann, Eindhoven, NL;
Linda van Leuken-Peters, Maarheeze, NL;
NXP B.V., Eindhoven, NL;
Abstract
An electronic device includes a metal-insulator-metal capacitive device. In connection with an example embodiment, a metal-insulator-metal (MIM) capacitor device is in a substrate having a surface and a three dimensional structure with high aspect ratio sidewalls. The MIM capacitor device includes a first capacitor electrode including a platinum group metal (PGM)-based layer and a Ta-based layer that is between the PGM-based layer and one of the sidewalls. The MIM capacitor also includes a second capacitor electrode and an insulator material between the first and second electrodes.