The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 29, 2013

Filed:

Feb. 20, 2012
Applicants:

Stefan Richter, Jena, DE;

Veljko Milanovic, Richmond, CA (US);

Günter Rudolph, Jena, DE;

Michel Stutz, Jena, DE;

Gerhard Krampert, Jena, DE;

Inventors:

Stefan Richter, Jena, DE;

Veljko Milanovic, Richmond, CA (US);

Günter Rudolph, Jena, DE;

Michel Stutz, Jena, DE;

Gerhard Krampert, Jena, DE;

Assignee:

Carl Zeiss AG, Oberkochen, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/26 (2006.01);
U.S. Cl.
CPC ...
Abstract

There is provided a scanning mirror device with a microsystem scanning mirror which is mounted rotatably about at least one axis, and a detection module which has a light source which emits a light beam, and a position detector, wherein the detection module directs the light beam onto the scanning mirror from behind, with the result that the light beam is reflected, at the back of the scanning mirror, to the position detector which measures the position of the reflected light beam, from which the rotation angle of the scanning mirror about the at least one axis can be deduced.


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