The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2013
Filed:
Feb. 26, 2009
Yoshio Kameda, Tokyo, JP;
Masamoto Tago, Tokyo, JP;
Yoshihiro Nakagawa, Tokyo, JP;
Koichiro Noguchi, Tokyo, JP;
Yoshio Kameda, Tokyo, JP;
Masamoto Tago, Tokyo, JP;
Yoshihiro Nakagawa, Tokyo, JP;
Koichiro Noguchi, Tokyo, JP;
NEC Corporation, Tokyo, JP;
Abstract
A semiconductor inspection apparatus comprising: a plurality of wafer stages, provided independently for each of a plurality of laminated semiconductor wafers, that directly or indirectly secure the corresponding semiconductor wafers and that possess a mechanism for positioning the corresponding semiconductor wafers; and a probe card, arranged outside or in between the plurality of laminated semiconductor wafers so as to face the semiconductor wafers, that transmits a signal or power to the plurality of semiconductor wafers.