The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 29, 2013

Filed:

Feb. 09, 2011
Applicants:

Shiguo Zhang, Camas, WA (US);

Sandrio Elim, Vancouver, WA (US);

Ling Bao, Vancouver, WA (US);

Inventors:

Shiguo Zhang, Camas, WA (US);

Sandrio Elim, Vancouver, WA (US);

Ling Bao, Vancouver, WA (US);

Assignee:

nLIGHT Photonics Corporation, Vancouver, WA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/485 (2006.01);
U.S. Cl.
CPC ...
Abstract

A metallization layer for a semiconductor device includes a first layer made of Pt and having a thickness greater than or equal to 15 Å and less than or equal to 50 Å, and a second layer formed on the first layer and made of a plurality of metallic sub-layers such as Ti/Pt/Au. A semiconductor device fabricated from the metallization layer includes a semiconductor substrate having a top layer and mesa structure and corresponding surface for securing an insulating layer and a corresponding exposed surface, and wherein the metallization layer is deposited over the insulating layer and exposed surface. Methods for forming the metallization layer are also disclosed.


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