The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2013
Filed:
Oct. 10, 2007
Kitt-wai Kok, Singapore, SG;
Kok Meng Ong, Singapore, SG;
Kathirgamasundaram Sooriakumar, Singapore, SG;
Bryan Keith Patmon, Singapore, SG;
Kitt-Wai Kok, Singapore, SG;
Kok Meng Ong, Singapore, SG;
Kathirgamasundaram Sooriakumar, Singapore, SG;
Bryan Keith Patmon, Singapore, SG;
Sensfab Pte Ltd, Cavendish, SG;
Abstract
A sensor for acoustic applications such as a silicone microphone is provided containing a backplate provided with apertures and a flexible diaphragm formed from a silicon on insulator (SOI) wafer which includes a layer of heavily doped silicon, a layer of silicon and an intermediate oxide layer that is connected to, and insulated from the backplate. The arrangement of the diaphragm in relation to the rest of the sensor and the sensor location, being mounted over the aperture in a PCB, reduces the acoustic signal pathway which allows the sensor to be both thinner and more importantly, enables there to be a greater back volume.