The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2013
Filed:
Jul. 26, 2010
Applicants:
Oliver Gessner, Albany, CA (US);
Oleg A. Kornilov, Berlin, DE;
Russell B. Wilcox, El Cerrito, CA (US);
Inventors:
Oliver Gessner, Albany, CA (US);
Oleg A. Kornilov, Berlin, DE;
Russell B. Wilcox, El Cerrito, CA (US);
Assignee:
The Regents of the University of California, Oakland, CA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 3/14 (2006.01); H01J 5/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention provides for a device comprising an apparatus comprising (a) a transmission grating capable of diffracting a photon beam into a diffracted photon output, and (b) an image detector capable of detecting the diffracted photon output. The device is useful for measuring the spatial profile and diffraction pattern of a photon beam, such as a vacuum ultraviolet (VUV) beam.