The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2013
Filed:
Jul. 29, 2011
Stephen Moffatt, St. Brelade, JE;
Douglas E. Holmgren, Portland, OR (US);
Samuel C. Howells, Portland, OR (US);
Edric Tong, Sunnyvale, CA (US);
Bruce E. Adams, Portland, OR (US);
Jiping LI, Palo Alto, CA (US);
Aaron Muir Hunter, Santa Cruz, CA (US);
Stephen Moffatt, St. Brelade, JE;
Douglas E. Holmgren, Portland, OR (US);
Samuel C. Howells, Portland, OR (US);
Edric Tong, Sunnyvale, CA (US);
Bruce E. Adams, Portland, OR (US);
Jiping Li, Palo Alto, CA (US);
Aaron Muir Hunter, Santa Cruz, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
The present invention generally relates to an optical system that is able to reliably deliver a uniform amount of energy across an anneal region contained on a surface of a substrate. The optical system is adapted to deliver, or project, a uniform amount of energy having a desired two-dimensional shape on a desired region on the surface of the substrate. An energy source for the optical system is typically a plurality of lasers, which are combined to form the energy field.