The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 29, 2013

Filed:

Aug. 13, 2012
Applicant:

Yoshihiro Takao, Yokohama, JP;

Inventor:

Yoshihiro Takao, Yokohama, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/8238 (2006.01); H01L 21/8242 (2006.01);
U.S. Cl.
CPC ...
Abstract

A semiconductor device includes a silicon substrate in which active regions of a memory cell are defined, a gate electrode formed on a device isolation insulating film to extend in a first direction, a first insulating film formed on the silicon substrate and the gate electrode, a first plug formed to penetrate the first insulating film, to overlap with the gate electrode and the first active region, and to extend in a second direction perpendicular to the first direction, a second plug penetrating the first insulating film above the second active region, a second insulating film formed on the first insulating film, and an interconnection buried in the second insulating film, and formed to recede from a side surface of the first plug in the second direction and to cover only part of an upper surface of the first plug.


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