The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 29, 2013

Filed:

Dec. 19, 2011
Applicants:

Geert Van Steenberge, Sint-Amandsberg, BE;

Erwin Bosman, Ghent, BE;

Hugo Thienpont, Gooik, BE;

Inventors:

Geert Van Steenberge, Sint-Amandsberg, BE;

Erwin Bosman, Ghent, BE;

Hugo Thienpont, Gooik, BE;

Assignees:

IMEC, Leuven, BE;

Vrije Universiteit Brussel, Brussels, BE;

Universiteit Gent, Ghent, BE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 1/24 (2006.01);
U.S. Cl.
CPC ...
Abstract

A sensor for sensing pressure is disclosed. The sensor may be a pressure sensor for sensing pressure, or a tactile sensor for sensing tactile events through pressure measurement. In one aspect, the sensor includes at least one pressure sensor having at least one VCSEL on a substrate. It further includes a compressible sensor layer covering a top surface of the at least one VCSEL, and a reflecting element covering a top surface of the sensor layer. A method of manufacturing such a sensor is also disclosed.


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