The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2013
Filed:
Aug. 29, 2011
Ulrich Albicker, Lauchringen, DE;
Christof Sonderegger, Neftenbach, CH;
Peter Meister, Neftenbach, CH;
Jochen Von Berg, Neftenbach, CH;
Rene Tanner, Seuzach, CH;
Jeffrey M. Schnellinger, Akron, NY (US);
Ulrich Albicker, Lauchringen, DE;
Christof Sonderegger, Neftenbach, CH;
Peter Meister, Neftenbach, CH;
Jochen Von Berg, Neftenbach, CH;
Rene Tanner, Seuzach, CH;
Jeffrey M. Schnellinger, Akron, NY (US);
Kistler Holding, AG, Winterthur, CH;
Abstract
A piezoresistive sensor chip element of a pressure sensor has lower face with an outer edge, an adhesion area and a non-adhesion area. The chip has a closed chip cavity for measuring the pressure of a medium flowing around the chip. The upper face of a substrate is fastened only at the adhesion area of the chip. The non-adhesion area extends at least over a circular area arranged centrally on the lower face and covers a third of the lower face's total area and extends over at least one connection area from the circular area to the edge of the lower face. The pressure in the pressure medium can spread through the connection area into a space under the non-adhesion area on the element lower face. The substrate has a recess located centrally under the sensor chip element.