The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2013
Filed:
Dec. 28, 2010
Applicants:
Derek Shaeffer, Redwood City, CA (US);
Baris Cagdaser, Sunnyvale, CA (US);
Chiung C. Lo, Campbell, CA (US);
Joseph Seeger, Menlo Park, CA (US);
Inventors:
Derek Shaeffer, Redwood City, CA (US);
Baris Cagdaser, Sunnyvale, CA (US);
Chiung C. Lo, Campbell, CA (US);
Joseph Seeger, Menlo Park, CA (US);
Assignee:
Invensense, Inc., San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/56 (2012.01);
U.S. Cl.
CPC ...
Abstract
An integrated MEMS device is disclosed. The system comprises a MEMS resonator; and a MEMS device coupled to a MEMS resonator. The MEMS resonator and MEMS device are fabricated on a common substrate so that certain characteristics of the MEM resonator and MEMS device track each other as operating conditions vary.