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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8565452 B1

PDFFull Text
Expired
Date of Patent:
Oct. 22, 2013

Filed:

Dec. 22, 2009

Integrated acoustic transducer in mems technology, and manufacturing process thereof

Applicants:

Luca Coronato, Corsico, IT;

Sarah Zerbini, Cornaredo, IT;

Angelo Antonio Merassi, Vigevano, IT;

Inventors:

Luca Coronato, Corsico, IT;

Sarah Zerbini, Cornaredo, IT;

Angelo Antonio Merassi, Vigevano, IT;

Assignee:

STMicroelectronics S.r.l., Agrate Brianza, IT;

Attorney:

Seed IP Law Group PLLC

Primary Examiner:

Duc Nguyen

Assistant Examiner:

Matthew Eason

Int. Cl.
CPC ...
H04R 25/00 (2006.01); H04R 9/08 (2006.01); H04R 11/04 (2006.01); H04R 17/02 (2006.01); H04R 19/04 (2006.01); H04R 21/02 (2006.01); H04R 1/00 (2006.01); H04R 9/06 (2006.01); H04R 11/02 (2006.01);
U.S. Cl.
CPC ...
Abstract

A MEMS acoustic transducer, for example, a microphone, includes a substrate provided with a cavity, a supporting structure, fixed to the substrate, a membrane having a perimetral edge and a centroid, suspended above the cavity and fixed to the substrate the membrane configured to oscillate via the supporting structure. The supporting structure includes a plurality of anchorage elements fixed to the membrane, and each anchorage element is coupled to a respective portion of the membrane between the centroid and the perimetral edge of the membrane.

Find Patent Forward Citations

Coronato, Luca. (2013). Integrated acoustic transducer in mems technology, and manufacturing process thereof (U.S. Patent No. 8565452). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8565452

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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