The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8563353 B1

PDF
Full Text
Expired
Date of Patent:
Oct. 22, 2013

Filed:

May. 08, 2012
Applicants:

Manchao Xiao, San Diego, CA (US);

Liu Yang, Yorba Linda, CA (US);

Xinjian Lei, Vista, CA (US);

Iain Buchanan, Stirling, GB;

Inventors:

Manchao Xiao, San Diego, CA (US);

Liu Yang, Yorba Linda, CA (US);

Xinjian Lei, Vista, CA (US);

Iain Buchanan, Stirling, GB;

Assignee:

Air Products and Chemicals, Inc., Allentown, PA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/06 (2006.01); H01L 21/469 (2006.01);
U.S. Cl.
CPC ...
Abstract

Described herein is a method and liquid-based precursor composition for depositing a multicomponent film. In one embodiment, the method and compositions described herein are used to deposit Germanium Tellurium (GeTe), Antimony Tellurium (SbTe), Antimony Germanium (SbGe), Germanium Antimony Tellurium (GST), Indium Antimony Tellurium (IST), Silver Indium Antimony Tellurium (AIST), Cadmium Telluride (CdTe), Cadmium Selenide (CdSe), Zinc Telluride (ZnTe), Zinc Selenide (ZnSe), Copper indium gallium selenide (CIGS) films or other tellurium and selenium based metal compounds for phase change memory and photovoltaic devices.


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