The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2013
Filed:
Jun. 27, 2011
Jinqiu Zhang, Fremont, CA (US);
Ying Hong, Los Gatos, CA (US);
Hai Sun, Milpitas, CA (US);
Hongping Yuan, Fremont, CA (US);
Guanghong Luo, Fremont, CA (US);
Xiaoyu Yang, Union City, CA (US);
Hongmei Han, Fremont, CA (US);
Lingyun Miao, Fremont, CA (US);
Jinqiu Zhang, Fremont, CA (US);
Ying Hong, Los Gatos, CA (US);
Hai Sun, Milpitas, CA (US);
Hongping Yuan, Fremont, CA (US);
Guanghong Luo, Fremont, CA (US);
Xiaoyu Yang, Union City, CA (US);
Hongmei Han, Fremont, CA (US);
Lingyun Miao, Fremont, CA (US);
Western Digital (Fremont), LLC, Fremont, CA (US);
Abstract
A method for fabricating a magnetic transducer having an air-bearing surface (ABS). An underlayer having a first and second regions and a bevel connecting these regions is provided. The first region is thicker and closer to the ABS than the second region. An intermediate layer conformal with the underlayer is provided. A hard mask layer having a top surface perpendicular to the ABS is formed on the intermediate layer. Part of the hard mask and intermediate layers are removed to provide a trench. The trench has a bottom surface and sidewalls having a first angle between the bottom surface and the intermediate layer and a second angle corresponding to the hard mask layer. A pole is provided in the trench. The pole has a pole tip, a yoke distal, and a bottom bevel. At least the yoke includes sidewalls having sidewall angles corresponding to the first and second angles.