The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2013
Filed:
Aug. 24, 2010
Applicants:
Harald Gross, Langebrueck, DE;
Carsten Deus, Dresden, DE;
Inventors:
Harald Gross, Langebrueck, DE;
Carsten Deus, Dresden, DE;
Assignee:
VON ARDENNE Anlagentechnik GmbH, Dresden, DE;
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/24 (2006.01);
U.S. Cl.
CPC ...
Abstract
A process and a device for coating substrates with a stoichiometric gradient in an in-line coating system include at least two evaporation devices, each with an evaporator tube. The evaporator tubes are implemented so as to be tiltable independently of one another, whereby the transition area of the two vapor lobes can be adapted to the requirements of the gradient profile. Furthermore, the spacing of the evaporator tubes from the substrate and each other can be set.