The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2013
Filed:
Oct. 11, 2005
Krist Dellaert, Zottegem, BE;
Wilmert DE Bosscher, Drongen, BE;
Joannes DE Boever, Deinze, BE;
Gregory Lapeire, Moorsele, BE;
Krist Dellaert, Zottegem, BE;
Wilmert De Bosscher, Drongen, BE;
Joannes De Boever, Deinze, BE;
Gregory Lapeire, Moorsele, BE;
Soleras Advanced Coatings BVBA, Deinze, BE;
Abstract
An end-block for use in a tubular magnetron sputtering apparatus is disclosed. Such an end-block rotatably transfers movement, coolantand electrical current to the target while maintaining vacuum integrity and a closed coolant circuit. It hence comprises a drive means, a rotary electrical contact means, a bearing means, a number of rotary coolant seal means and a number of vacuum seal means. The inventive end-block occupies a minimal axial length along the target thus allowing 10 space savings in existing equipment such as e.g. display coaters. The axial length is reduced by mounting at least two of the means radial to one another.