The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2013
Filed:
Aug. 22, 2007
Applicants:
Osamu Ueda, Toyama, JP;
Hiroyuki Iwakura, Toyama, JP;
Inventors:
Osamu Ueda, Toyama, JP;
Hiroyuki Iwakura, Toyama, JP;
Assignee:
Hitachi Kokusai Electric Inc., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F 19/00 (2011.01); G06F 9/44 (2006.01); G11C 11/34 (2006.01);
U.S. Cl.
CPC ...
Abstract
There are provided at least one or more of substrate processing apparatuses that process a substrate, and a group management device connected to each substrate processing apparatus, so that the group management device monitors an operation state of the substrate processing apparatus, thereby grasping a timing of updating a program of the substrate processing apparatus, and when the timing arrives, updates the program.