The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2013
Filed:
Jan. 18, 2013
Canon Kabushiki Kaisha, Tokyo, JP;
Akira Shimazu, Hiratsuka, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A charged particle beam lens includes a first electrode on a downstream side and a second electrode on an upstream side in a travelling direction of a charged particle beam. Each of the first electrode and the second electrode has a first through hole formed therein, through which the charged particle beam passes. The second electrode further has a second through hole formed therein, through which the charged particle beam does not pass. A distance defining member is provided between the first electrode and the second electrode such that the first electrode and the second electrode are spaced away from each other. A gap is surrounded the first electrode, the second electrode, and the distance defining member, wherein both the first through and the second through hole communicate to the gap. A third through hole passes through the first electrode and the second electrode in the travelling direction of the charged particle beam, and the third through hole is provided outside of the gap and does not communicate to the gap.