The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2013
Filed:
Mar. 17, 2008
Applicants:
Steve Sheeran, Longmont, CO (US);
Mark A. Toffle, Saint Louis Park, MN (US);
Mark D. Anderson, Champlin, MN (US);
Rodney D. Dahlenburg, Prior Lake, MN (US);
Colin G. Presly, Shakopee, MN (US);
Paul J. Poisson, Boulder, CO (US);
Inventors:
Steve Sheeran, Longmont, CO (US);
Mark A. Toffle, Saint Louis Park, MN (US);
Mark D. Anderson, Champlin, MN (US);
Rodney D. Dahlenburg, Prior Lake, MN (US);
Colin G. Presly, Shakopee, MN (US);
Paul J. Poisson, Boulder, CO (US);
Assignee:
Seagate Technology LLC, Cupertino, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H05B 3/68 (2006.01);
U.S. Cl.
CPC ...
Abstract
Embodiments of the present invention are directed to establishing a desired position control over a workpiece by compensating for thermal cycling affecting a member supporting the workpiece during processing.