The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2013
Filed:
Nov. 29, 2011
Seiichiro Shirai, Kanagawa, JP;
Seiichiro Shirai, Kanagawa, JP;
Renesas Electronics Corporation, Kanagawa, JP;
Abstract
An exposure apparatus includes a light emission partgenerating EUV light by plasma excitation of a predetermined atom, a condenser partcondensing the EUV light emitted from the light emission part, an exposure partirradiating a substrate via a mask with the EUV light condensed by the condenser part, a first plasma position monitordetecting the position of an emission point of the EUV light within the light emission part, and a light emission part drive unitadjusting the position of the light emission part. The exposure apparatus determines a first shift amount between the emission point detected by the plasma position monitor and a reference light emission position, and drives the light emission part drive unit according to the first shift amount.