The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2013
Filed:
Jan. 24, 2011
Andrew C. Mcneil, Chandler, AZ (US);
Gary G. LI, Chandler, AZ (US);
Andrew C. McNeil, Chandler, AZ (US);
Gary G. Li, Chandler, AZ (US);
Freescale Semiconductor, Inc., Austin, TX (US);
Abstract
A microelectromechanical systems (MEMS) sensor () includes a substrate () and a suspension anchor () formed on a planar surface () of the substrate (). A first folded torsion spring () and a second folded torsion spring () interconnect the movable element () with the suspension anchor () to suspend the movable element () above the substrate (). The folded torsion springs () are each formed from multiple segments () that are linked together by bar elements () in a serpentine fashion. The folded torsion springs () have an equivalent shape and are oriented relative to one another in rotational symmetry about a centroid () of the suspension anchor ().