The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2013
Filed:
Aug. 14, 2012
Masayoshi Sugino, Anjo, JP;
Kazuki Fukatsu, Anjo, JP;
Yoshitaka Tomita, Okazaki, JP;
Masamichi Shibata, Toyota, JP;
Yuya Abe, Kariya, JP;
Masayoshi Sugino, Anjo, JP;
Kazuki Fukatsu, Anjo, JP;
Yoshitaka Tomita, Okazaki, JP;
Masamichi Shibata, Toyota, JP;
Yuya Abe, Kariya, JP;
Nippon Soken, Inc., Nishio, JP;
Denso Corporation, Kariya, JP;
Abstract
In a high frequency plasma generation system, a magnetic resonance section is provided as a frequency multiplier section between a discharge circuit and a power booster circuit. The magnetic resonance section extracts from a fundamental wave of a predetermined frequency generated by a frequency generator higher harmonic components, which are multiplied waves of the predetermined frequency and as high as two or more integer times of the fundamental wave. A resonance frequency of the power booster circuit and a first resonance coil is set to be equal to the frequency of the multiplied wave and match to equal a resonance frequency of the discharge circuit and a second resonance coil of the magnetic resonance section when a discharge electrode and a ground electrode are in a predetermined pressure range.