Method of measuring and evaluating mechanical outputs of piezoelectric actuators, controlling method of the same, and apparatus using those methods

Abstract

The present invention relates to a method of measuring and evaluating rigidity of a target object or mechanical output, such as force, displacement, and mechanical energy generated by a piezoelectric actuator and applied to the target object, according to only a measured value of electric quantity without use of a mechanical sensor, and a method of controlling the piezoelectric actuator, and a device using these methods. Steps of finding equivalent circuit constants of the piezoelectric actuator; applying a voltage to the piezoelectric actuator and measuring electrical quantity flowing into the piezoelectric actuator due to the applied voltage, or applying an electric charge to the piezoelectric actuator and measuring voltage applied to the piezoelectric actuator due to the applied electric charge; and measuring and evaluating one or more of force, displacement, or mechanical energy generated by the piezoelectric actuator and applied to a target object, or rigidity of a target object are included. While these values are measured and evaluated minutely, applied voltage and electrical quantity are adjusted and controlled.