The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2013
Filed:
Oct. 19, 2010
Shogo Inaba, Shiojiri, JP;
Akira Sato, Fujimi, JP;
Toru Watanabe, Matsumoto, JP;
Takeshi Mori, Matsumoto, JP;
Shogo Inaba, Shiojiri, JP;
Akira Sato, Fujimi, JP;
Toru Watanabe, Matsumoto, JP;
Takeshi Mori, Matsumoto, JP;
Seiko Epson Corporation, , JP;
Abstract
A micro electro mechanical system (MEMS) device includes: a fixed electrode made of silicon and provided above a semiconductor substrate; a movable electrode made of silicon and arranged in a mechanically movable manner by having a gap from the semiconductor substrate; and a wiring layered part that is provided around the movable electrode, covers a portion of the fixed electrode and includes wiring. One of the fixed electrode and the movable electrode is implanted with an impurity ion and at least a part of the portion of the fixed electrode covered by the wiring layered part is silicidized.