The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2013
Filed:
Mar. 11, 2010
Lisa H. Karlin, Chandler, AZ (US);
Lianjun Liu, Chandler, AZ (US);
Alex P. Pamatat, Austin, TX (US);
Paul M Winebarger, Austin, TX (US);
Lisa H. Karlin, Chandler, AZ (US);
Lianjun Liu, Chandler, AZ (US);
Alex P. Pamatat, Austin, TX (US);
Paul M Winebarger, Austin, TX (US);
Freescale Semiconductor, Inc., Austin, TX (US);
Abstract
A wafer structure () includes a device wafer () and a cap wafer (). Semiconductor dies () on the device wafer () each include a microelectronic device () and terminal elements (). Barriers () are positioned in inactive regions () of the device wafer (). The cap wafer () is coupled to the device wafer () and covers the semiconductor dies (). Portions () of the cap wafer () are removed to expose the terminal elements (). The barriers () may be taller than the elements () and function to prevent the portions () from contacting the terminal elements () when the portions () are removed. The wafer structure () is singulated to form multiple semiconductor devices (), each device () including the microelectronic device () covered by a section of the cap wafer () and terminal elements () exposed from the cap wafer ().