The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2013
Filed:
Nov. 06, 2006
Naoki Tamaoki, Minato-ku, JP;
Akio Ui, Minato-ku, JP;
Toshiro Takase, Minato-ku, JP;
Takashi Ichikawa, Minato-ku, JP;
Naoki Tamaoki, Minato-ku, JP;
Akio Ui, Minato-ku, JP;
Toshiro Takase, Minato-ku, JP;
Takashi Ichikawa, Minato-ku, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
A calculating unit calculates either one of a reaction probability between a chemical species used in a semiconductor process and a semiconductor device and a deactivation probability of the chemical species, according to either one of a structure of the semiconductor device and a plurality of materials. A simulation unit performs a simulation of a physical phenomenon occurring in a reaction chamber based on either one of the reaction probability and the deactivation probability.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile