The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2013
Filed:
Mar. 04, 2010
Martijn Goossens, Veldhoven, NL;
Hilco Suy, Hulst, NL;
Peter Gerard Steeneken, Valkenswaard, NL;
Jozef Thomas Martinus Van Beek, Rosmalen, NL;
Martijn Goossens, Veldhoven, NL;
Hilco Suy, Hulst, NL;
Peter Gerard Steeneken, Valkenswaard, NL;
Jozef Thomas Martinus van Beek, Rosmalen, NL;
NXP B.V., Eindhoven, NL;
Abstract
A MEMS device comprises first and second opposing electrode arrangements (), wherein the second electrode arrangement () is electrically movable to vary the electrode spacing between facing sides of the first and second electrode arrangements. At least one of the facing sides has a non-flat surface with at least one peak and at least one trough. The height of the peak and depth of the trough is between 0.01t and 0.1t where t is the thickness of the movable electrode.