The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2013
Filed:
Jun. 20, 2007
Greg P. Miller, Colorado Springs, CO (US);
Michael R. Johnson, Colorado Springs, CO (US);
John J. O'connor, Antioch, IL (US);
Martin Joseph, Wheaton, IL (US);
Greg P. Miller, Colorado Springs, CO (US);
Michael R. Johnson, Colorado Springs, CO (US);
John J. O'Connor, Antioch, IL (US);
Martin Joseph, Wheaton, IL (US);
Atmel Corporation, San Jose, CA (US);
Abstract
A system and method for control of water content in a strip bath. The method to control water content in a solvent bath used for cleaning of semiconductor parts in the back end of semiconductor manufacturing requires addition of water to replace evaporated water. This is done by periodically adjusting a conductivity setpoint at least in part based on the elapsed chemical bathlife and at least in part based on the number of semiconductor parts that have been processed in the bath. The conductivity of the strip bath solution is then continuously measured (as by using an electrodeless conductivity probe). Water is added (as by a DI water injection system) into the bath solution whenever the solvent conductivity falls below the conductivity set point.