The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 24, 2013
Filed:
Apr. 07, 2009
Kensuke Kageyama, Kita-ku, JP;
Kensuke Kageyama, Kita-ku, JP;
National University Corporation Saitama University, Saitama-shi, JP;
Abstract
An electro-mechanical transducer contains a vibrating electrode (), a vibrating-electrode-insulating film () disposed at a bottom surface of the vibrating electrode (), an electret layer () facing to the vibrating electrode (), an electret-insulating layer () joined to a top surface of the electret layer (), and a back electrodein contact with a bottom surface of the electret layer (). A microgap between ten nanometers and 100 micrometers is established between the vibrating-electrode-insulating film () and electret-insulating layer (). A central line average roughness Ra of the vibrating electrode (), including a bending, is 1/10 or less of a gap width measured between the bottom surface of the vibrating electrode () and the top surface of the electret layer ().