The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 24, 2013

Filed:

Jul. 10, 2012
Applicants:

Liyang Pan, Beijing, CN;

Haozhi MA, Beijing, CN;

Inventors:

Liyang Pan, Beijing, CN;

Haozhi Ma, Beijing, CN;

Assignee:

Tsinghua University, Beijing, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/108 (2006.01); H01L 21/8239 (2006.01);
U.S. Cl.
CPC ...
Abstract

A memory array structure and a method for forming the same are provided. The memory array structure comprises: a substrate; a plurality of memory cells, each memory cell including a vertical transistor, of which a gate structure is formed in a first trench extending in a first direction; a plurality of word lines in the first direction, each word line formed in the first trench; a plurality of bit lines in a second direction, each bit line formed in lower sides of a semiconductor pillars; a plurality of body lines in the first direction, each body line having a first portion formed on the gate electrodes and a second portion covering a part of a top surface of semiconductor pillar for providing a substrate contact to vertical channel regions; and a plurality of data storage device contacts.


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