The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 24, 2013
Filed:
Sep. 03, 2009
Applicants:
Yu-cheng Chen, Hsin-Chu, TW;
An-thung Cho, Hsin-Chu, TW;
Ching-sang Chuang, Hsin-Chu, TW;
Chia-tien Peng, Hsin-Chu, TW;
Inventors:
Yu-Cheng Chen, Hsin-Chu, TW;
An-Thung Cho, Hsin-Chu, TW;
Ching-Sang Chuang, Hsin-Chu, TW;
Chia-Tien Peng, Hsin-Chu, TW;
Assignee:
AU Optronics Corp., Science-Based Industrial Park, Hsin-Chu, TW;
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01T 1/20 (2006.01);
U.S. Cl.
CPC ...
Abstract
A structure of X-ray detector includes a Si-rich dielectric material for serving as a photo-sensing layer to increase light sensitivity. The fabrication method of the X-ray detector including the Si-rich dielectric material needs less photolithography-etching processes, so as to reduce the total thickness of thin film layers and decrease process steps and cost.