The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2013
Filed:
Nov. 21, 2008
Applicants:
Jun-ying Zhang, Woodbury, MN (US);
Terry L. Smith, Roseville, MN (US);
Barry J. Koch, Woodbury, MN (US);
Yasha Yi, Woodbury, MN (US);
Inventors:
Jun-Ying Zhang, Woodbury, MN (US);
Terry L. Smith, Roseville, MN (US);
Barry J. Koch, Woodbury, MN (US);
Yasha Yi, Woodbury, MN (US);
Assignee:
3M Innovative Properties Company, St. Paul, MN (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 6/10 (2006.01); G02B 6/26 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for making a waveguide comprises (a) providing a waveguide structure comprising a substrate (), a lower cladding () layer on the substrate, and a core layer () comprising silicon nitride, amorphous silicon, or amorphous silicon-germanium alloy on the lower cladding layer; (b) patterning the core layer; and (c) annealing () the waveguide structure.