The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2013
Filed:
Sep. 28, 2011
Paul J. Resnick, Albuquerque, NM (US);
Kristin L. Hertz, Livermore, CA (US);
Christopher Holland, San Jose, CA (US);
David Chichester, Idaho Falls, ID (US);
Paul Schwoebel, Bosque Farms, NM (US);
Paul J. Resnick, Albuquerque, NM (US);
Kristin L. Hertz, Livermore, CA (US);
Christopher Holland, San Jose, CA (US);
David Chichester, Idaho Falls, ID (US);
Paul Schwoebel, Bosque Farms, NM (US);
Sandia Corporation, Albuquerque, NM (US);
Abstract
An integrated field emission array for ion desorption includes an electrically conductive substrate; a dielectric layer lying over the electrically conductive substrate comprising a plurality of laterally separated cavities extending through the dielectric layer; a like plurality of conically-shaped emitter tips on posts, each emitter tip/post disposed concentrically within a laterally separated cavity and electrically contacting the substrate; and a gate electrode structure lying over the dielectric layer, including a like plurality of circular gate apertures, each gate aperture disposed concentrically above an emitter tip/post to provide a like plurality of annular gate electrodes and wherein the lower edge of each annular gate electrode proximate the like emitter tip/post is rounded. Also disclosed herein are methods for fabricating an integrated field emission array.