The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2013
Filed:
Aug. 26, 2009
Applicant:
Katsuhiko Yano, Yokosuka, JP;
Inventor:
Katsuhiko Yano, Yokosuka, JP;
Assignee:
Toho Chemical Industry Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C08G 65/38 (2006.01); C07C 43/11 (2006.01);
U.S. Cl.
CPC ...
Abstract
[PROBLEM] To provide a novel star polymer useful as resist materials with high sensitivity and high resolution, and a novel coupling agent for anionic polymerization for synthesizing the polymer. [MEANS FOR SOLVING THE PROBLEM] A star polymer comprising: a core part derived from a coupling agent for anionic polymerization composed of an acid-degradable compound having an organic group derived from a halide; and an arm part that is attached to the core part and composed of an acid-degradable polymer chain obtained by anionic polymerization; and the coupling agent for anionic polymerization.