The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2013
Filed:
Nov. 29, 2011
Applicants:
Robert K. Speck, Kokomo, IN (US);
Kenneth B. Tull, Carmel, IN (US);
Marjorie L. Miller, Marion, IN (US);
Inventors:
Robert K. Speck, Kokomo, IN (US);
Kenneth B. Tull, Carmel, IN (US);
Marjorie L. Miller, Marion, IN (US);
Assignee:
GM Global Technology Operations LLC, Detroit, MI (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for fabricating a device includes forming a silicide layer on a substrate, forming a conductive layer over exposed portions of the substrate and the silicide layer, patterning and removing exposed portions of the conductive layer and the silicide layer with a first process, and patterning and removing exposed portions of the conductive layer with a second process.