The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2013
Filed:
Oct. 22, 2009
Applicants:
Itaru Hagiwara, Hino, JP;
Naoyuki Nozawa, Inagi, JP;
Inventors:
Itaru Hagiwara, Hino, JP;
Naoyuki Nozawa, Inagi, JP;
Assignee:
Canon Anelva Corporation, Kawasaki-Shi, Kanagawa-Ken, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
Abstract
A substrate transport apparatus comprises chambers connected to each other through a gate valve, a transport mechanism configured to open the gate valve and to transport a carrier between the chambers along a transport path, a sensor configured to detect the carrier before the carrier reaches a stop position in the chamber, and a controller configured to cause the gate valve to start closing based on the detection signal from the sensor.