The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2013
Filed:
Sep. 20, 2010
Applicants:
Ching-hsiang Cheng, Hong Kong, HK;
Chen Chao, Hong Kong, HK;
Inventors:
Ching-Hsiang Cheng, Hong Kong, HK;
Chen Chao, Hong Kong, HK;
Assignee:
The Hong Kong Polytechnic University, Hong Kong, HK;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/08 (2006.01);
U.S. Cl.
CPC ...
Abstract
A Capacitive Micromachined Ultrasonic Transducer (CMUT) having a membrane operatively connected to a top electrode and having a bottom electrode having a concave void. When a DC bias voltage is applied, the membrane is deflected towards the bottom electrode such that a peripheral edge region of the membrane is brought into close proximity with the bottom electrode and an electrostatic force proximal to the peripheral edge region of the membrane is increased.