The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2013
Filed:
Sep. 08, 2010
Diaa A. Khalil, Cairo, EG;
Bassem Mortada, Nasr, EG;
Mohamed Nabil, Cairo, EG;
Mostafa Medhat, Cairo, EG;
Bassam A. Saadany, Cairo, EG;
Diaa A. Khalil, Cairo, EG;
Bassem Mortada, Nasr, EG;
Mohamed Nabil, Cairo, EG;
Mostafa Medhat, Cairo, EG;
Bassam A. Saadany, Cairo, EG;
Si-Ware Systems, Inc., Cairo, EG;
Abstract
A Micro Electro-Mechanical System (MEMS) spectrometer architecture compensates for verticality and dispersion problems using balancing interfaces. A MEMS spectrometer/interferometer includes a beam splitter formed on a first surface of a first medium at an interface between the first medium and a second medium, a first mirror formed on a second surface of the first medium, a second mirror formed on a third surface of the first medium and balancing interfaces designed to minimize both a difference in tilt angles between the surfaces and a difference in phase errors between beams reflected from the first and second mirrors.