The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 10, 2013

Filed:

Apr. 20, 2010
Applicants:

Noriaki Soga, Hachioji, JP;

Hiroshi Sugiyama, Hachioji, JP;

Takayuki Sera, Hachioji, JP;

Jun Koshoubu, Hachioji, JP;

Inventors:

Noriaki Soga, Hachioji, JP;

Hiroshi Sugiyama, Hachioji, JP;

Takayuki Sera, Hachioji, JP;

Jun Koshoubu, Hachioji, JP;

Assignee:

JASCO Corporation, Hachioji-shi, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01); G01J 3/00 (2006.01); G01J 5/02 (2006.01);
U.S. Cl.
CPC ...
Abstract

An object of the present invention is to provide a total reflection measuring apparatus which, while visually observing a specific minute area of a measurement object, is capable of efficiently obtaining optical data on the basis of the total reflection measurement. A microscopic total reflection measuring apparatus of the present invention comprises a Cassegrain mirrorhaving a Cassegrain primary mirrorand a Cassegrain secondary mirror, which condenses an incident light beamon a measurement objectby making an incident light beam successively reflected by the secondary mirrorand the primary mirror, and which obtains a reflected light beamfrom the measurement objectby making the reflected light beamsuccessively reflected by the primary mirrorand the secondary mirror. And, a total reflection prismis arranged below the Cassegrain secondary mirror. And the incident light beam includes a visible light beam for visual observation and a measurement light beam for acquisition of analysis information, and present invention comprises a visible light filter which separates at least one of the incident light beam to the total reflection prism and the reflected light beam from the total reflection prisminto a total reflection area B and a normal reflection area A, and which removes, from the one of the incident light beam and the reflected light beam, the visible light beam in the total reflection area B.


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